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Journal of Vacuum Science & Technology B / Volume 29 / Issue 5 / Review Article

J. Vac. Sci. Technol. B 29, 050801 (2011); http://dx.doi.org/10.1116/1.3623419 (10 pages)

Fabrication and performance of graphene nanoelectromechanical systems

Robert A. Barton1, Jeevak Parpia2, and Harold G. Craighead3

1Department of Applied and Engineering Physics, Cornell University, 212 Clark Hall, Ithaca, New York 14853
2Department of Physics, Cornell University, Clark Hall, Ithaca, New York 14853
3Department of Applied and Engineering Physics, Cornell University, 205 Clark Hall, Ithaca, New York 14853

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(Published online 9 September 2011)

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As a result of the recent progress in fabricating large-area graphene sheets, graphene-based mechanical devices have become vastly easier to manufacture and now show even greater promise for a range of applications. This article reviews the progress of resonant graphene nanoelectromechanical systems and the possible applications of this technology to signal processing, sensing, and other areas. After discussing recent advances in fabrication and measurement techniques that make graphene resonators a viable technology, the article presents what is known about the performance of graphene mechanical systems. The authors also highlight unresolved questions, such as the source of the dissipation in graphene resonators, and discuss the progress made on these issues to date. The authors conclude with a discussion of important future directions for graphene research and the applications for which graphene nanomechanical devices may be well suited.

© 2011 American Vacuum Society

ACKNOWLEDGMENTS

The authors thank A.M. van der Zande, I.R. Storch, and P. L. McEuen for useful discussions. The authors are grateful for support from the National Science Foundation through DMR-0908634 and through the Cornell Center for Materials Research, part of the NSF MRSEC Program.

Article Outline

  1. INTRODUCTION
  2. FABRICATION
    1. Graphene production
    2. Fabrication of mechanical devices
  3. PERFORMANCE, CHALLENGES, AND APPLICATIONS
    1. Actuation and detection of mechanical motion
    2. Quality factor
    3. Frequency reproducibility and tuning
    4. Performance as sensors
    5. Membranes
  4. OUTLOOK AND CONCLUSIONS

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KEYWORDS and PACS

Keywords

graphene, nanoelectromechanical devices, resonators

PACS

  • 81.07.Oj

    Nanoelectromechanical systems (NEMS)

  • 81.05.ue

    Graphene

  • 84.40.Az

    Waveguides, transmission lines, striplines

  • 85.85.+j

    Micro- and nano-electromechanical systems (MEMS/NEMS) and devices

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History
Received 16 February 2011
Accepted 28 June 2011
Published online 9 September 2011
Digital Object Identifier
http://dx.doi.org/10.1116/1.3623419

PUBLICATION DATA

ISSN

1071-1023 (print)  
1520-8567 (online)

Publisher

American Vacuum Society

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